Major:Plasma physics

Education Level:With Certificate of Graduation for Study as Master's Candidates

Degree:Master's Degree

Current Status:Graduated

Graduation Thesis Title:射频感性耦合等离子体中容性耦合对放电模式和基片调谐自偏压的影响

Date of Registration:2004-09-01

Date of Graduation:2007-07-01