Current position: Home >> Scientific Research >> Paper Publications

纵弯式压电微电机研究

Release Time:2019-03-10  Hits:

Indexed by: Journal Article

Date of Publication: 2001-06-30

Journal: 中国机械工程

Included Journals: CSCD、PKU

Volume: 12

Issue: 6

Page Number: 704-706

ISSN: 1004-132X

Key Words: 纵弯式;压电微电机;驱动机理;设计规则

Abstract: 分析了纵弯式压电微电机的驱动机理,提出了电机驱动臂的设计方法.研制了直径为5 mm的纵弯式压电微电机并进行了实验研究.

Prev One:TiNi形状记忆薄膜的光刻新工艺

Next One:理想材料零件的数字化设计制造方法及内涵