Hits:
Indexed by:期刊论文
Date of Publication:2010-01-01
Journal:Wireless Personal Communications
Volume:11
Issue:11
Page Number:1-24
Pre One:基于感应耦合等离子刻蚀技术的三维微拉伸梁制作工艺
Next One:高温环境条件下微悬臂梁谐振频率温度特性及测试技术