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论文类型：期刊论文

发表时间：2011-04-01

发表刊物：13th International Meeting on Chemical Sensors (IMCS-13)

收录刊物：CPCI-S、SCIE、EI、Scopus

卷号：9

期号：2

页面范围：670-674

ISSN号：1546-198X

关键字：Humidity Sensor; Zirconia Thin Film; Sol-Gel; Multi-Layered

摘要：Multi-layered zirconia (ZrO(2)) thin film on the Pt/Ti/SiO(2)/Si substrate has been prepared as humidity sensing material by sol gel method. Annealing temperature was 450 degrees C. A TiO(2) thin film was added in between ZrO(2) film and the substrate for improving the adhesion. The films were characterized by using X-ray diffraction (XRD), atomic force microscope (AFM) and Fourier-transform infrared (FT-IR) spectra. The impedance of the humidity sensor changes about four orders of magnitude within the relative humidity (RH) range of 11-98%, indicating a good sensitivity. The response time of the sensor was about 5 s. The humidity sensing mechanism was discussed by means of the complex impedance curves and an equivalent circuit of the sensor.