Release Time:2019-03-11  Hits:

Indexed by: Journal Article

Date of Publication: 2005-10-12

Journal: 物理学报

Included Journals: Scopus、CSCD、ISTIC、PKU、SCIE

Volume: 54

Issue: 10

Page Number: 4794-4798

ISSN: 1000-3290

Key Words: 尘埃等离子体;尘埃空洞;尘埃云

Abstract: 利用气体合成(乙烯和硅烷,氩气是载气)的方法,产生尘埃粒子,并在此基础上研究了悬浮在射频等离子体鞘层上方的尘埃云及尘埃空洞.实验结果给出了尘埃云和尘埃空洞与射频功率和气压等参数的关系曲线.