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张鹏云

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Associate Professor Supervisor of Master's Candidates

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李玉洁, 张鹏云, 杜玉翠.射频等离子体中尘埃空洞演化研究[J],真空,2012,49(5):57-61
王华强, 张鹏云, 李玉洁.脉冲调制磁化容性耦合放电中Ar+光谱特性研究[J],真空,2012,49(2):86-91
Wu Jing, Zhang Pengyun, Sun Jizhong, Yao Lieming, Duan Xuru, Wu, J (reprint author), Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China..Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures (SiH4/C2H4/Ar) Radio-Frequency Discharge[J],PLASMA SCIENCE & TECHNOLOGY,2011,13(5):561-566
Wu Jing, Zhang Peng-Yun, Sun Ji-Zhong, Yao Lie-Ming, Duan Xu-Ru, Wu, J (reprint author), Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China..Dust Particle Density and Charges in Radio-Frequency Mixture Discharge Plasma[J],CHINESE PHYSICS LETTERS,2011,28(9)
张鹏云.脉冲调制射频容性耦合SiH4/C2H4/Ar放电的发射光谱诊断[J],真空,2011,48(3):28-31
Sun, Jizhong, Li, Xiantao, Sang, Chaofeng, Jiang, Wei, Zhang, Pengyun, Wang, Dezhen, JZ (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Engn, Dalian 116024, Peoples R China..Particle-in-cell simulation of hydrogen discharge driven by combined radio frequency and pulse sources[J],PHYSICS OF PLASMAS,2010,17(10)

一种利用驻波共振耦合电能的磁控放电方法

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