location: Current position: Home >> Scientific Research >> Paper Publications

脉冲调制射频容性耦合SiH4/C2H4/Ar放电的发射光谱诊断

Hits:

Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:真空

Included Journals:ISTIC

Volume:48

Issue:3

Page Number:28-31

Pre One:Dust Particle Density and Charges in Radio-Frequency Mixture Discharge Plasma

Next One:Particle-in-cell simulation of hydrogen discharge driven by combined radio frequency and pulse sources