脉冲调制射频容性耦合SiH4/C2H4/Ar放电的发射光谱诊断
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2011-01-01
Journal: 真空
Included Journals: ISTIC
Volume: 48
Issue: 3
Page Number: 28-31
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2011-01-01
Journal: 真空
Included Journals: ISTIC
Volume: 48
Issue: 3
Page Number: 28-31