A direct current glow discharge plasma source for inner surface modification of metallic tube
Release Time:2022-10-13 Hits:
Date of Publication: 2022-10-04
Journal: NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B BEAM INTERACTIO
Institution: 物理学院
Volume: 263
Issue: 2
Page Number: 535-537
ISSN: 0168-583X