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铜互连层表面的约束刻蚀化学平坦化新方法

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Leading Scientist:Renke Kang

Supported by:国家自然科学基金项目

Sub-Class of Project:重点项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:91023043

Date of Project Approval:2010-09-25

Scheduled completion time:2014-12-31

Date of Project Initiation:2011-01-01

Date of Project Completion:2014-12-31

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