Current position: Home >> Scientific Research >> Research Projects

大尺寸晶圆精密磨削减薄设备的研究与产业化

Hits:

Leading Scientist:Renke Kang

Supported by:企事业单位委托科技项目

Status:结题

Supported by:无锡机床股份有限公司

Nature of Project:横向

Date of Project Approval:2009-03-15

Scheduled completion time:2015-03-15

Date of Project Initiation:2009-03-15

Pre One:磨削硅片的软磨料砂轮

Next One:真空吸附加工工艺方法及系统研究