Indexed by:Journal Papers
Date of Publication:2020-03-01
Journal:TRIBOLOGY INTERNATIONAL
Included Journals:EI、SCIE
Volume:143
ISSN No.:0301-679X
Key Words:Material removal characteristics; Corrod; Elastic deformation model; Nanoscratch
Abstract:At present, CMP is the only ultra-precision machining technology that can achieve global flattening. Unfortunately, CMP processing efficiency is extremely unsatisfactory. Although the processing efficiency can be improved by increasing the alkaline concentration of CMP slurry, the surface quality will deteriorate rapidly due to excessive concentration. In this study, the removal characteristics of both uncorroded and precorroded Lu2O3 laser crystals were investigated based on nanoscratch tests with edge-forward Berkovich indenter. Further, the elastic deformation model considering both elastic extrusion and elastic recovery deformation was established. The origin of the microcracks was then discussed. The observed responses of surface quality were shown to depend greatly on the extent of elastic deformation prevalent during the nanoscratch and associated material removal processes.
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
Gender:Male
Alma Mater:西北工业大学
Degree:Doctoral Degree
School/Department:机械工程学院
Discipline:Mechanical Manufacture and Automation. Mechatronic Engineering. Manufacturing Engineering of Aerospace Vehicle
Business Address:机械工程学院7191
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