Indexed by:期刊论文
Date of Publication:2008-05-15
Journal:SURFACE & COATINGS TECHNOLOGY
Included Journals:SCIE、EI
Volume:202
Issue:16
Page Number:3897-3902
ISSN No.:0257-8972
Key Words:unbalanced magnetron sputtering; LaxCeyO1-x-y films; microstructure; tribological properties
Abstract:A series of LaxCeyO1-x-y films (x= 0-0.54, y= 0-0.58) with thickness of 35-45 nm was deposited by unbalanced magnetron sputtering. High-resolution transmission electron microscope observation shows that La0.24Ce0.34O0.42 film has polycrystalline structure. La2O3 and CeO2 are formed within the LaxCeyO1-x-y films confirmed by the X-ray diffraction and X-ray photoelectron microscopy The friction coefficient and residual compressive stress of five kinds of three-element compound films exhibit symmetric distribution with the relative equilibrium of La and Ce atomic concentration within the films. The critical load of all deposited films is between 28 and 33 mN. The friction coefficient of two kinds of rare earth complex oxide films is in the range of 0.08-0.09, which is lower than that of only one kind of rare earth oxide films, and the friction mechanism is discussed. (C) 2008 Elsevier B.V. All rights reserved.
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
Gender:Male
Alma Mater:西北工业大学
Degree:Doctoral Degree
School/Department:机械工程学院
Discipline:Mechanical Manufacture and Automation. Mechatronic Engineering. Manufacturing Engineering of Aerospace Vehicle
Business Address:机械工程学院7191
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