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超精密低损伤磨削硅片的软磨料砂轮

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First Author:Renke Kang

Disigner of the Invention:Shang GAO,Dongming Guo,jinzhuji,赵海轩

Application Number:CN201010128957.6

Authorization Date:2010-03-17

Authorization number:CN101780662A

Pre One:可调式测力仪标定加载台的布局方法及装置

Next One:用于检测蓝宝石基片表面层损伤的腐蚀剂
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