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用于硅片超精密磨床的压电式磨削力测量装置

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First Author:qianmin

Disigner of the Invention:zhangjun,Renke Kang,刘博,zhuxianglong,Dongming Guo

Application Number:CN200910220064.1

Authorization Date:2009-11-18

Authorization number:CN101716747A

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