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一种化学机械抛光单晶氧化镁基片用的抛光液

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First Author:Renke Kang

Disigner of the Invention:wangke,jinzhuji,Dongming Guo,Dong Zhigang,wangninghui

Application Number:CN200610047159.4

Authorization Date:2006-07-05

Authorization number:CN1884410

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