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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
性别：男
毕业院校：西北工业大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械电子工程. 航空宇航制造工程
办公地点：机械工程学院7191
电子邮箱：kangrk@dlut.edu.cn
Analysis of Laminar Flow Over a Non-Conventional Random Rough Surface Based on Lattice Boltzmann Method
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论文类型：期刊论文
发表时间：2012-01-01
发表刊物：JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME
收录刊物：SCIE、EI、Scopus
卷号：134
期号：1
ISSN号：0742-4787
关键字：lubricant flow; rough surface; chemical mechanical planarization; lattice Boltzmann method
摘要：The average flow model offers a great convenience for the analysis of laminar flow over rough surfaces and is widely used in simulation studies. Flow factors used in the average flow model are generally expressed as a function of statistical properties of a single level rough surface with gentle slopes. However, for a nonconventional surface with multilevel roughness or high local surface slopes, such as polishing pads used in chemical mechanical planarization (CMP), it has not been verified whether this model is still applicable as expected. Generally, computations based on the Reynolds equation are carried out repeatedly for the same problem regarding different but statistically identical rough surfaces, and the average flow model is applicable if stable flow factors (statistical average) are obtained. However, due to the complex topography and high local surface slopes of polishing pads used in CMP, the Reynolds equation is no longer valid, and thus a new method needs to be developed to estimate the applicability of the average flow model and to calculate the flow factors accurately. In this study, aiming to research the flow over a nonconventional random rough surface such as the slurry flow in CMP, a new strategy is developed to research the incompressible laminar flow through a narrow gap between various nonconventional rough surfaces by combining the lattice Boltzmann method (LBM) and numerical simulation of random rough surface. With this strategy, it is convenient to simulate the flow field in a narrow gap between various random rough surfaces and obtain the flow factors. In addition, an analytical formula for calculating the flow factors of a dual-level rough surface, i.e., surface composed of two different types of microstructure, is introduced and verified through a comparison with the results obtained using the presented numerical simulation strategy. [DOI: 10.1115/1.4005517]