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A study of the effect of optical parameters on the performance of diamond photo-assisted chemical mechanical polishing - Based on ReaxFF MD molecular dynamics simulations

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Indexed by:Journal Papers

Document Code:586326

Date of Publication:2025-11-18

Journal:DIAMOND AND RELATED MATERIALS

Volume:159

ISSN:0925-9635

Key Words:PLANARIZATION; SURFACE

Next One : Insights into the surface oxidation modification mechanism of nano-diamond: An atomistic understanding from ReaxFF simulations

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Gender:Female

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

Business Address:机械工程学院知方楼5011

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