Insights into the atomistic behavior in diamond chemical mechanical polishing with OH environment using ReaxFF molecular dynamics simulation
发表时间：2020-04-09 点击次数：
论文名称：Insights into the atomistic behavior in diamond chemical mechanical polishing with OH environment using ReaxFF molecular dynamics simulation
论文类型：期刊论文
发表刊物：Computational Materials Science
卷号：166
页面范围：136-142
发表时间：2019-01-01
