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适用于SOC的声热力微传感器系统的基础研究

Release Time:2017-06-11  Hits:

Classification of Project: 国家自然科学基金

Sub-Class of Project: 重点基金

Date of Project Approval: 2019-03-25

Scheduled Completion Time: 2019-03-25

Date of Project Initiation: 2019-03-25

Date of Project Completion: 2019-03-25

Prev One:硅微传声器和微气压传感器及其阵列集成芯片系统研究