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适用于SOC的声热力微传感器系统的基础研究

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Classification of Project:国家自然科学基金

Sub-Class of Project:重点基金

Date of Project Approval:2019-03-25

Scheduled completion time:2019-03-25

Date of Project Initiation:2019-03-25

Date of Project Completion:2019-03-25

Pre One:硅微传声器和微气压传感器及其阵列集成芯片系统研究