硅微传声器和微气压传感器及其阵列集成芯片系统研究
Release Time:2017-06-11 Hits:
Classification of Project: 国家自然科学基金
Sub-Class of Project: 重点项目
Date of Project Approval: 2019-03-25
Scheduled Completion Time: 2019-03-25
Date of Project Initiation: 2019-03-25
Date of Project Completion: 2019-03-25