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基于体硅加工技术的电热驱动微夹钳制作方法

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First Author:Chu Jinkui

Disigner of the Invention:Zhang Ran,刘帅,zhangcheng,王文静

Affilication of Author(s):机械工程学院

Application Number:CN101695992

Authorization number:CN200910187860.X

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