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一种柔性电热驱动微夹钳及制作工艺方法

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First Author:Chu Jinkui

Disigner of the Invention:Zhang Ran,陈兆鹏

Affilication of Author(s):机械工程学院

Application Number:CN102079498A

Authorization number:CN201010560298.3

Pre One:导航传感器的微型偏振光检测装置

Next One:基于体硅加工技术的电热驱动微夹钳制作方法
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