杜立群

个人信息Personal Information

教授

博士生导师

硕士生导师

性别:女

毕业院校:东北大学

学位:博士

所在单位:机械工程学院

学科:机械制造及其自动化. 微机电工程. 机械电子工程

办公地点:西部校区机械学院新大楼6009房间

电子邮箱:duliqun@dlut.edu.cn

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高精度AZ厚胶光刻及在微型射频同轴器制作中的应用

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发表时间:2022-10-09

发表刊物:航空制造技术

所属单位:机械工程学院

卷号:61

期号:9

页面范围:26-31

ISSN号:1671-833X

摘要:Based on UV-LIGA technology, a novel passive RF coaxial transmitter was fabricated on a metal substrate by combining positive and negative photoresist. Aiming at low dimensional accuracy of thick positive photoresist AZ50XT caused by the uneven distribution of exposure dose within the resist, the method of multiple exposure and development was proposed to make high-precision electroforming mask. The effect of this method on dimensional accuracy was studied by lithography experiment of different size graphics. The experiment results show that the method of multiple exposure and development can significantly improve the dimensional accuracy of AZ50XT resist and the accuracy of the lithography pattern is no related to the mask size. Finally, based on the experiment results, a kind of passive coaxial transmitter was fabricated. The overall dimension is 3000μm×400μm×200μm, the maximum height of single layer is 60μm and the sidewall inclination of each layer is more than 85°.

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