Hits:
Indexed by:会议论文
Date of Publication:2013-08-15
Page Number:126-126
Pre One:Numerical simulation of particle densities distributions in atmospheric pressure Ar/SiH4/H2 mixed plasma under very high frequency excitation
Next One:SiH_4浓度对混合气体Ar/SiH_4/H_2放电过程中粒子密度分布的影响
