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高掺硼多晶金刚石薄膜的制备和表征

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Indexed by:期刊论文

Date of Publication:2009-01-01

Journal:材料科学与工程学报

Included Journals:PKU、ISTIC

Volume:26

Issue:2

Page Number:42-44

Pre One:甲烷流量对高掺硼金刚石多晶薄膜形态生长的影响

Next One:The Influence of Gas Pressures and Bias Current on the Crystal Properties of Highly Boron-doped Diamond Films
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