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Indexed by:会议论文

Date of Publication:2008-10-27

Included Journals:EI、Scopus

Volume:7134

Abstract:Two kinds of liquid photopatternable inorganic-organic hybrid polymer materials polysiloxanes, named as PSQ-LL and PSQ-LH, are prepared by a sol-gel process at room temperature. The refractive indexes of waveguide materials can be tuned linearly from 1.4482 to 1.5212 at 1310nm and from 1.4478 to 1.5198 at 1550nm by blending PSQ-LL and PSQ-LH. These materials have low optical losses of 0.31dB/cm at 1310nm and 0.80dB/cm at 1550nm, and high thermal stability with 1% decomposition temperatures of 297°C (in air) and 340°C (in N2) for PSQ-LH and 313°C (in air) and 370°C (in N2) for PSQ-LL. Typical waveguide structures based on PSQ-Ls are fabricated by UV imprint technology. © 2008 SPIE.