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Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides

Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2009-08-17

Journal: OPTICS EXPRESS

Included Journals: Scopus、EI、SCIE

Volume: 17

Issue: 17

Page Number: 14627-14633

ISSN: 1094-4087

Abstract: Athermal silicon ring resonators are experimentally demonstrated by overlaying a polymer cladding on narrowed silicon wires. The ideal width to achieve athermal condition for the TE mode of 220nm-height SOI waveguides is found to be around 350nm. After overlaying a polymer layer, the wavelength temperature dependence of the silicon ring resonator is reduced to less than 5 pm/degrees C, almost eleven times less than that of normal silicon waveguides. The optical loss of a 350-nm bent waveguide (with a radius of 15 mu m) is extracted from the ring transmission spectrum. The scattering loss is reduced to an acceptable level of about 50dB/cm after overlaying a polymer cladding. (C) 2009 Optical Society of America

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