Title of Paper:Structure and Electrical Characteristics of Zinc Oxide Thin Films Grown on Si (111) by Metal-organic Chemical Vapor Deposition

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Date of Publication:2013-09-01

Journal:JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY

Included Journals:SCIE、EI、ISTIC、Scopus

Volume:29

Issue:9

Page Number:830-834

ISSN No.:1005-0302

Key Words:ZnO thin films; Metal-organic chemical vapor deposition; Conductive atomic force microscopy; Scanning electron microscopy

Abstract:ZnO thin films were grown on Si (111) substrates by low-pressure metal-organic chemical vapor deposition. The crystal structures and electrical properties of as-grown sample were investigated by scanning electron microscopy (SEM) and conductive atomic force microscopy (C-AFM). It can be seen that with increasing growth temperature, the surface morphology of ZnO thin films changed from flake-like to cobblestones-like structure. The current maps were simultaneously recorded with the topography, which was gained by C-AFM contact mode. Conductivity for the off-axis facet planes presented on ZnO grains enhanced. Measurement results indicate that the off-axis facet planes were more electrically active than the c-plane of ZnO flakes or particles probably due to lower Schottky barrier height of the off-axis facet planes.