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Growth of high c-orientated crystalline GaN films on amorphous Cu/glass substrates with low-temperature ECR-PEMOCVD

Release Time:2022-10-03  Hits:

Date of Publication: 2022-10-02

Journal: JOURNAL OF MATERIALS SCIENCE MATERIALS IN ELECTRONICS

Institution: 物理学院

Volume: 25

Issue: 2,SI

Page Number: 969-973

ISSN: 0957-4522

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