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Growth of high c-orientated crystalline GaN films on amorphous Cu/glass substrates with low-temperature ECR-PEMOCVD

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Date of Publication:2022-10-02

Journal:JOURNAL OF MATERIALS SCIENCE MATERIALS IN ELECTRONICS

Affiliation of Author(s):物理学院

Volume:25

Issue:2,SI

Page Number:969-973

ISSN No.:0957-4522

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