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A comparative study of intermediate layers for the growth of high crystalline GaN films on amorphous glass substrates with low-temperature ECR-PEMOCVD

Release Time:2022-10-07  Hits:

Date of Publication: 2022-10-04

Journal: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Institution: 物理学院

Volume: 26

Issue: c

Page Number: 182-186

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