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一种β-碳化硅薄膜的制备方法

Release Time:2018-04-02  Hits:

Disigner of the Invention: Jiming Bian,张志坤,毕凯峰,刘艳红,刘维峰,Qin Fuwen

Institution: 物理与光电工程学院

Authorization Date: 2016-01-20

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