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冶金提纯多晶硅用坩埚内壁氮化硅涂层的制备

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Date of Publication:2011-01-01

Journal:机械工程材料

Issue:06

Page Number:8-12+75

ISSN No.:1000-3738

Note:新增回溯数据

Pre One:Effect of heating treatment on the resistivity of polycrystalline silicon

Next One:Effect of Pulling Rate on Multicrystalline Silicon Ingot during Directional Solidification
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