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晶硅炉热场用碳材料在硅蒸汽中的腐蚀行为研究

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Indexed by:期刊论文

Date of Publication:2022-07-01

Journal:无机材料学报

Affiliation of Author(s):材料科学与工程学院

Volume:32

Issue:7

Page Number:744-750

ISSN No.:1000-324X

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