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晶硅炉热场用碳材料在硅蒸汽中的腐蚀行为研究

Release Time:2022-07-02  Hits:

Indexed by: Journal Article

Date of Publication: 2022-07-01

Journal: 无机材料学报

Institution: 材料科学与工程学院

Volume: 32

Issue: 7

Page Number: 744-750

ISSN: 1000-324X

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