Research of boron removal from polysilicon using CaO-Al2O3-SiO2-CaF2 slags
Release Time:2022-10-08 Hits:
Date of Publication: 2022-10-08
Journal: 真空
Institution: 材料科学与工程学院
Volume: 103
Page Number: 33-37
ISSN: 0042-207X
Release Time:2022-10-08 Hits:
Date of Publication: 2022-10-08
Journal: 真空
Institution: 材料科学与工程学院
Volume: 103
Page Number: 33-37
ISSN: 0042-207X