Modeling of heat transfer in target material during the electron beam evaporation process
Release Time:2024-05-04 Hits:
Indexed by: Journal Papers
Document Code: 384610
Date of Publication: 2024-04-10
Journal: VACUUM
Volume: 222
ISSN: 0042-207X
Key Words: FABRICATION; FLOW; MECHANISM; NUMERICAL-SIMULATION; POOL; POROSITY FORMATION; PURIFICATION; SILICON; TEMPERATURE