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Slag refining at various viscosity conditions for SiC inclusion removal during Si scraps recycling

Release Time:2024-06-29  Hits:

Indexed by: Journal Papers

Document Code: 362596

Date of Publication: 2023-03-15

Journal: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Volume: 156

ISSN: 1369-8001

Key Words: BORON; DIRECTIONAL SOLIDIFICATION; METALLURGICAL GRADE SILICON; PHOSPHORUS

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