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一种铝硼母合金掺杂制备多晶硅靶材的铸造工艺

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Disigner of the Invention:jiangdachuan,王凯,Yi Tan,任世强,lipengting

Affilication of Author(s):材料科学与工程学院

Pre One:一种制备硼母合金的方法

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