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采用电子束注入去除多晶硅中杂质硼的方法

Release Time:2020-05-14  Hits:

First Author: Yi Tan

Disigner of the Invention: 董伟,邹瑞洵,姜大川

Application Number: CN201010242065.9

Authorization Date: 2010-07-29

Authorization Number: CN101891202A

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