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一种电子束过热熔炼去除多晶硅中金属杂质的方法和装置

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First Author:jiangdachuan

Disigner of the Invention:shishuang,王登科,Yi Tan

Affilication of Author(s):材料科学与工程学院

Application Number:CN104556050A

Authorization number:CN201410829665.3

Pre One:一种冶金法去除工业硅中杂质硼的方法

Next One:一种在多晶硅定向凝固提纯中分离高金属杂质区的设备及分离方法
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