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采用电子束注入去除多晶硅中杂质硼的方法

Release Time:2022-10-20  Hits:

First Author: Yi Tan

Disigner of the Invention: 姜大川,邹瑞洵,董伟

Institution: 材料科学与工程学院

Application Number: CN101891202A

Authorization Number: CN201010242065.9

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