Hits:
First Author:Yi Tan
Disigner of the Invention:林海洋,温书涛,shishuang,jiangdachuan
Affilication of Author(s):材料科学与工程学院
Application Number:CN104131337A
Authorization number:CN201410339742.7
Pre One:一种去除工业硅中硼的方法
Next One:电子束顶部局部加热凝固多晶硅除杂装置及多晶硅加热凝固除杂方法