论文名称:真空感应熔炼和定向凝固制备多晶硅中铝的除杂
发表刊物:材料研究学报
卷号:24
期号:4
页面范围:373-377
ISSN号:1005-3093
摘要:Purification mechanism of impurity aluminum in multicrystalline silicon
ingot made from metallurgical-grade silicon was investigated by
composition analysis and theoretical analysis of vacuum induction
melting and directional solidification. The results showed that the
content of impurity aluminum was significantly decreased due to the
obviously evaporation in the stage of thermal insulation (T≥1723 K).The
segregation of impurity aluminum plays an important role in the
distribution of aluminum in subsequent directional solidification
process, but a little amount aluminum evaporation still happened. A new
theoretical model including segregation phenomenon and evaporation
mechanism was developed to simulate the distribution of aluminum in
multicrystaliine silicon. The result of simulation was well consistent
with the measured distribution of aluminum in the obtained ingot
备注:新增回溯数据
发表时间:2010-01-01