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大气压下氩气在双级联平板电极中射频电容耦合放电特性的研究

Release Time:2022-07-02  Hits:

Indexed by: Conference Paper

Date of Publication: 2022-06-29

Journal: 第十四届全国等离子体科学技术会议暨第五届中国电推进技术学术研讨会

Page Number: 1

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