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Mode coexistence in radio frequency capacitive discharge of flowing argon at atmospheric pressure with bare perforated electrodes

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Date of Publication:2022-10-07

Journal:真空

Affiliation of Author(s):物理学院

Volume:104

Issue:2

Page Number:1-5

Pre One:Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

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