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Characteristic study of decomposing CF4 in a nitrogen microwave plasmas torch at atmospheric pressure

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Date of Publication:2022-10-05

Journal:JOURNAL OF PHYSICS D APPLIED PHYSICS

Volume:53

Issue:25

ISSN No.:0022-3727

Pre One:Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge

Next One:Characterization of Mode Coexistence in Argon Rf Discharge at Atmospheric Pressure
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