Hits:

Indexed by:期刊论文

Date of Publication:2006-12-01

Journal:JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS

Included Journals:EI、SCIE、Scopus

Volume:45

Issue:12

Page Number:9213-9215

ISSN No.:0021-4922

Key Words:plasma jet; atmospheric pressure; electron temperature; electron density

Abstract:In this study, the electrical discharge characteristics of an atmospheric-pressure helium plasma jet using radio-frequency power supply are investigated by measuring the electrical parameters (voltage, current, power, and phase angle). The plasma parameters (electron temperature and electron density) are estimated on the basis of the electrical experiment data using the equivalent circuit model and the power balance equation. By varying input power, a "phase saturation" region is identified. The optimized flow rate ratio between oxygen and helium is found to be 0.1/40slpm in the experiment.