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反应溅射法制备铝钛掺杂氧化锆薄膜及其热稳定性

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Indexed by:期刊论文

Date of Publication:2009-01-01

Journal:材料科学与工程学报

Included Journals:PKU、ISTIC

Volume:26

Issue:12

Page Number:64-66

Pre One:Scaling behavior and structure transition of ZrO2 films deposited by RF magnetron sputtering

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