Current position: Home >> Scientific Research >> Paper Publications

Optical and electrical properties of Zn1-xZdxO films grown on Si substrates by reactive-frequency magnetron sputtering

Release Time:2019-03-13  Hits:

Indexed by: Journal Article

Date of Publication: 2006-01-01

Journal: Applied Physics letters

Volume: 89

Page Number: 1923-

Prev One:沉积温度对ZrO_2薄膜结构及表面形貌的影响

Next One:高k栅介质薄膜材料研究进展