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Rehabilitation of MgO(001) Substrate Surface for Growth of Single-Crystal LaBaCo2O5+delta Films by Magnetron Sputtering

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Indexed by:期刊论文

Date of Publication:2016-08-01

Journal:CRYSTAL GROWTH & DESIGN

Included Journals:SCIE、EI、Scopus

Volume:16

Issue:8

Page Number:4272-4277

ISSN No.:1528-7483

Abstract:Single-crystal films are at the foundation of a number of advanced technologies, such as for devices related to microelectronics, optoelectronics, spintronics, and superconducting electronics. In this study, high-temperature annealing was used to rehabilitate the MgO(001) surface to improve the crystallinity of highly epitaxial LaBaCo2O5+delta (LBCO) films, which have demonstrated potential for applications in fast gas sensors. In comparison with the LBCO film grown on the as received substrate, solid evidence is presented to support that the rehabbed substrates facilitate deposition of single-crystal LBCO films by radio frequency magnetron sputtering at the optimized conditions. Thus, substrate annealing is demonstrated to be a practical and effective method for rehabbing the damaged surface of a substrate induced by manufacture and surface milling and is promising for a range of important applications based on the growth of single-crystal films.

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