Associate Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title : 仪器仪表学会传感器分会理事；中国仪器仪表学会微纳器件与系统技术分会理事；IEEE会员
Paper Publications
A Double Layer Micro-bridge Calorimeter
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Indexed by:Conference Paper
Date of Publication:2011-10-28
Included Journals:Scopus、CPCI-S、EI
Page Number:870-873
Abstract:A novel double layer micro-bridge calorimeter structure is designed, in which an upper bridge suspends upon the lower one with its center membrane covering that of the lower one. This structure enables the self-align sputtering deposition of sample films with thickness of sub-micrometers easily without shadow mask. Finite element analyses simulation shows that this double layer calorimeter has the similar performance as the traditional micro-calorimeters, and the measurement error is less than 0.5 nJ/K and it can accurately measures the melting point of the sample film.